Integrated Circuits and Fabrication--Silicon Refining and Other Raw Materials--Bulk Crystal Growth--Electrical Characteristics of Processed Materials--Chemical Rate Processes and Kinetics--Chemical Vapor Deposition Reactors--Incorporation and Transport of Dopants--Pattern Generation, Transfer, and Delineation--Physical and Physicochemical Rate Processes--Physical Vapor Deposition Apparatuses--Packaging--Appendix Tables--Acknowledgements